Electronic and optical properties of indium zinc oxide thin films prepared by using nanopowder target
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<jats:p> Indium zinc oxide (IZO) films were deposited on glass substrates using the rf-magnetron sputtering method and a powder target made up of nanoparticles with a size less than 100 nm. In this study, the optical, structural, and electrical properties of the IZO films deposited using a nanopowder target compared with those of the IZO films deposited using a micropowder target made up of microparticles with a size greater than 30 µm were examined. The IZO films deposited using nanopowder at room temperature were amorphous and showed a low resistivity of 4.5 ×10<jats:sup>-4</jats:sup> Ω·cm and a high transmittance over an average of 85% in the visible range, indicating that these films showed more enhanced properties than the IZO film deposited using micropowder. The enhanced properties of the IZO film prepared with nanopowder were considered to be caused by the marked improvement in packing density with increases in refractive index and surface roughness from atomic force microscopy (AFM) images due to the powder target consisting of nanoparticles. </jats:p>
収録刊行物
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- Japanese journal of applied physics : JJAP
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Japanese journal of applied physics : JJAP 50 (4), 045801-, 2011-04
Tokyo : The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1520290883731583616
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- NII論文ID
- 40018800889
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- NII書誌ID
- AA12295836
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- ISSN
- 00214922
- 13474065
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- NDL書誌ID
- 11075921
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- 本文言語コード
- en
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- NDL 雑誌分類
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- ZM35(科学技術--物理学)
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- データソース種別
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- NDL
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