Measurements of variable-shaped electron beams with solid-state detector and scattering aperture

DOI Web Site Web Site Web Site 参考文献6件

書誌事項

タイトル別名

Measurements of variable shaped electron beams with solid state detector and scattering aperture
Special issue: Microprocesses & nanotechnology
Special issue Microprocesses nanotechnology

コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌

Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP

Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 46 (9B), 6166-6170, 2007-09

Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics