Characteristics of Hydrogen Negative Ions in Sheet Plasma
Bibliographic Information
- Other Title
-
- Special Issue: Plasma Processing
- Special Issue Plasma Processing
Search this article
Journal
-
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
-
Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 45 (10B), 8212-8216, 2006-10
IOP Publishing