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Fabrication of whitely luminescent silicon-rich nitride films by atmospheric pressure chemical vapor deposition
Bibliographic Information
- Other Title
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- Fabrication of whitely luminescent silicon rich nitride films by atmospheric pressure chemical vapor deposition
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Description
資料形態 : テキストデータ プレーンテキスト
コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
Journal
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- Japanese journal of applied physics : JJAP
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Japanese journal of applied physics : JJAP 47 (6), 4696-4699, 2008-06
Tokyo : The Japan Society of Applied Physics