Epitaxial Growth of SiGe Films Grown by Ion-Beam Sputtering and Generation of Large Thermoelectric Power

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  • Epitaxial Growth of SiGe Films Grown by Ion Beam Sputtering and Generation of Large Thermoelectric Power
  • イオンビームスパッタ法によるSiGe膜のエピタキシャル成長と巨大熱起電力の発現
  • 2004 Asia-Pacific Workshop on Fundamentals and Applicat ion of Advanced Semiconductor Devices (AWAD 2004)
  • 2004 Asia Pacific Workshop on Fundamentals and Applicat ion of Advanced Semiconductor Devices AWAD 2004

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