Direct Measurement of Offset Spacer Effect on Carrier Profiles in Sub-50nm p-Metal Oxide Semiconductor Field-Effect Transistors

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Direct Measurement of Offset Spacer Effect on Carrier Profiles in Sub 50nm p Metal Oxide Semiconductor Field Effect Transistors
Special Issue: Solid State Devices & Materials
Special Issue Solid State Devices Materials

コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌

Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP

Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 45 (4B), 3133-3136, 2006-04

Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics