High-Throughput and Low-Cost Fabrication of Polymer Microscanner for Lighting Applications
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<jats:p> A high-throughput and low-cost fabrication process for an optical microscanner is proposed for lighting applications. The process utilizes mold replication and transfer of printed functional layers to form a film. We confirmed that a high-throughput fabrication lasting less than 30 s could be obtained by using a mold with a knife edge. A polymer microscanner with feature size of 0.6×2 mm<jats:sup>2</jats:sup> was successfully fabricated using our process. The scanner was actuated by magnetic forces generated by an external coil, and the mirror tilt angle was successfully measured by a strain gauge formed by the functional layer transfer. By synchronizing the LED input signal and the polymer scanner tilt angle, the illuminance distribution could be controlled. For example, this distribution could be expanded from 10 to 50° or divided into two separated spots. We believe that our developed process can address new MEMS applications such as commercial lighting. </jats:p>
収録刊行物
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- Japanese journal of applied physics : JJAP
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Japanese journal of applied physics : JJAP 52 (10), 106701-, 2013-10
Tokyo : The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1520572360502028672
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- NII論文ID
- 40022765877
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- NII書誌ID
- AA12295836
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- ISSN
- 00214922
- 13474065
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- NDL書誌ID
- 031857483
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- 本文言語コード
- en
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- NDL 雑誌分類
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- ZM35(科学技術--物理学)
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- データソース種別
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- NDL
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