Characterization of Defects in Liquid Phase Epitaxial InP and InGaAsP Crystals by Scanning Electron Microscopy and Electron Beam Induced Current Method

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Other Title
  • CCharacterization of Defects in Liquid P

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Abstract

記事分類: 物理学--分子・物性--半導体

Journal

  • Journal of electron microscopy

    Journal of electron microscopy 33 (1), p1-9, 1984

    Oxford : Published for the Japanese Society of Electron Microscopy by Oxford University Press

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