Monte Carlo Simulation of Hydrocarbon Redeposition on a Graphite Surface in Hydrogen Plasma

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Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP

Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 46 (3A), 1149-1156, 2007-03

Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics