Effects of resist thickness and viscoelasticity on the cavity filling capability in bilayer thermal embossing
Bibliographic Information
- Other Title
-
- Special issue: Microprocesses and nanotechnology
- Special issue Microprocesses and nanotechnology
Search this article
Journal
-
- Japanese journal of applied physics : JJAP
-
Japanese journal of applied physics : JJAP 50 (6), 2011-06
Tokyo : The Japan Society of Applied Physics
- Tweet
Details 詳細情報について
-
- CRID
- 1520853832182343680
-
- NII Article ID
- 80021771321
-
- NII Book ID
- AA12295836
-
- ISSN
- 00214922
-
- NDL BIB ID
- 11131204
-
- Text Lang
- en
-
- NDL Source Classification
-
- ZM35(科学技術--物理学)
-
- Data Source
-
- NDL
- CiNii Articles
