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The Formation of Air Void on Patterned Sapphire Substrate by Selective Photoresist Carbonization
Bibliographic Information
- Other Title
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- KJMST2016 (The 3rd Korea-Japan International Symposium on Materials Science and Technology)論文特集号
- KJMST2016 (The 3rd Korea-Japan International Symposium on Materials Science and Technology)ロンブン トクシュウゴウ
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Journal
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- 材料の科学と工学 : 日本材料科学会誌
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材料の科学と工学 : 日本材料科学会誌 54 (4), 112-117, 2017
東京 : 日本材料科学会 ; 2002-
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Details 詳細情報について
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- CRID
- 1520853832678498304
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- NII Article ID
- 40021307461
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- NII Book ID
- AA11602237
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- ISSN
- 13474774
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- NDL BIB ID
- 028487906
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- Text Lang
- en
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- NDL Source Classification
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- ZM16(科学技術--科学技術一般--工業材料・材料試験)
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- Data Source
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- NDL Search
- CiNii Articles