Spatially varied orientation selective epitaxial growth of (100) and (110) CeO2 layers on Si(100) substrates using absorbed electron imaging system

Bibliographic Information

Other Title
  • Spatially varied orientation selective epitaxial growth of 100 and 110 CeO2 layers on Si 100 substrates using absorbed electron imaging system
  • 吸収電流像観察システムを用いて空間的に分離して方位選択エピタキシャル成長させたSi(100)基板上の(100)と(110)CeO2層の形成

Search this article

Journal

Details 詳細情報について

Report a problem

Back to top