Decomposition of CF4 using pulsed-electron-beam-generated atmospheric-pressure low-temperature plasmas
Bibliographic Information
- Other Title
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- Decomposition of CF4 using pulsed electron beam generated atmospheric pressure low temperature plasmas
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Abstract
コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
Journal
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- Japanese journal of applied physics : JJAP
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Japanese journal of applied physics : JJAP 47 (7), 5681-5683, 2008-07
Tokyo : The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1520853833782269056
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- NII Article ID
- 40016161819
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- NII Book ID
- AA12295836
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- ISSN
- 00214922
- 13474065
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- NDL BIB ID
- 9586193
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- Text Lang
- en
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- NDL Source Classification
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- ZM35(科学技術--物理学)
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- Data Source
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- NDL
- Crossref
- CiNii Articles