Development of ultraviolet crosslinking glucose-based resist materials for advanced electronic device applications using nanoimprint lithography
書誌事項
- タイトル別名
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- Development of ultraviolet crosslinking glucose based resist materials for advanced electronic device applications using nanoimprint lithography
- Special issue: Nano electronic materials
- Special issue Nano electronic materials
この論文をさがす
収録刊行物
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- Japanese journal of applied physics : JJAP
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Japanese journal of applied physics : JJAP 50 (1), 2011-01
Tokyo : The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1520853833877153024
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- NII論文ID
- 40017446923
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- NII書誌ID
- AA12295836
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- ISSN
- 00214922
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- NDL書誌ID
- 10947320
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- 本文言語コード
- en
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- NDL 雑誌分類
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- ZM35(科学技術--物理学)
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- データソース種別
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- NDL
- CiNii Articles
