Characterization of hot-implanted Fe near the SiO2/Si interface
Bibliographic Information
- Other Title
-
- Characterization of hot implanted Fe near the SiO2 Si interface
Search this article
Journal
-
- Japanese journal of applied physics : JJAP
-
Japanese journal of applied physics : JJAP 50 (3), 035601-, 2011-03
Tokyo : The Japan Society of Applied Physics
- Tweet
Details 詳細情報について
-
- CRID
- 1520853834413494144
-
- NII Article ID
- 40018777913
-
- NII Book ID
- AA12295836
-
- ISSN
- 00214922
- 13474065
-
- NDL BIB ID
- 11054528
-
- Text Lang
- en
-
- NDL Source Classification
-
- ZM35(科学技術--物理学)
-
- Data Source
-
- NDL
- Crossref
- CiNii Articles
