Cross-sectional TEM analysis of laser-induced ripple structures on the 4H-SiC single-crystal surface

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  • Cross sectional TEM analysis of laser induced ripple structures on the 4H SiC single crystal surface
  • 4H-SiC単結晶表面のレーザ誘起リップル構造の断面TEM解析

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  • 技研所報

    技研所報 45 (2), 74-77, 2009-07

    東久留米 : 機械振興協会技術研究所

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