Local Mechanical-Stress Control(LMC): A New Technique for CMOS-Performance Enhancement

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  • Local Mechanical Stress Control LMC A New Technique for CMOS Performance Enhancement

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  • 日立超LSI技報

    日立超LSI技報 4 (24), 21-26, 2002-03

    国分寺 : 日立超LSIシステムズ

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