Use of Low Energy Ions for Removal of Damaged Layer of Cross-sectioned Specimen Prepared by Focused Ion Beam
Bibliographic Information
- Other Title
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- Use of Low Energy Ions for Removal of Damaged Layer of Cross sectioned Specimen Prepared by Focused Ion Beam
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Journal
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- Journal of surface analysis / 表面分析研究会 編
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Journal of surface analysis / 表面分析研究会 編 7 (3), 314-319, 2000-12
東京 : 表面分析研究会
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Details 詳細情報について
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- CRID
- 1522825130848119552
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- NII Article ID
- 40005083437
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- NII Book ID
- AA11448771
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- ISSN
- 13411756
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- NDL BIB ID
- 5631194
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- Text Lang
- en
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- NDL Source Classification
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- ZM35(科学技術--物理学)
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- Data Source
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- NDL
- CiNii Articles
