Raman spectroscopic stress evaluation of femtosecond-laser-modified region inside 4H-SiC

Details 詳細情報について

• CRID

  1523106605189982720

• NII Article ID

  10027013184

• NII Book ID

  AA12295133

• ISSN

  18820778

  18820786

• DOI

  10.1143/apex.3.016603

• NDL BIB ID

  10522390

• Web Site

  http://id.ndl.go.jp/bib/10522390

  https://ndlsearch.ndl.go.jp/books/R000000004-I10522390

  http://stacks.iop.org/1882-0786/3/i=1/a=016603/pdf

• Text Lang

  en

• NDL Source Classification

  • ZM35(科学技術--物理学)

• Data Source

  • NDL
  • Crossref
  • CiNii Articles