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Source of surface morphological defects formed on 4H-SiC homoepitaxial films
Bibliographic Information
- Other Title
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- Source of surface morphological defects formed on 4H SiC homoepitaxial films
- 4H-SiCホモエピタキシャル膜上に形成した表面形態欠陥の源
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Journal
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- 技研所報
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技研所報 43 (2), 92-98, 2007-07
東久留米 : 機械振興協会技術研究所
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Keywords
Details 詳細情報について
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- CRID
- 1523388078282013952
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- NII Article ID
- 40015624678
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- NII Book ID
- AN00050899
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- ISSN
- 0289243X
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- NDL BIB ID
- 8930095
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- Text Lang
- en
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- NDL Source Classification
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- ZM5(科学技術--科学技術一般--工学・工業)
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- Data Source
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- NDL Search
- CiNii Articles