Source of surface morphological defects formed on 4H-SiC homoepitaxial films

Web Site

Bibliographic Information

Other Title
  • Source of surface morphological defects formed on 4H SiC homoepitaxial films
  • 4H-SiCホモエピタキシャル膜上に形成した表面形態欠陥の源

Search this article

Journal

  • 技研所報

    技研所報 43 (2), 92-98, 2007-07

    東久留米 : 機械振興協会技術研究所

Keywords

Details 詳細情報について

Report a problem

Back to top