Mathematical Formulation of Electron-hydrogen (e, 2e) Process based on Distorted-wave Born Approximation(Special Features on Simulation Technologies Useful for MEMS Research)

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  • 電子衝突イオン化現象の歪曲波ボルン近似による定式化(「MEMS研究に役立つシミュレーション技術」)

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In a particle simulation for material processing, the accuracy of cross section data in particle collisions is very important from the viewpoint of the practical engineering. Distorted-wave Born approximation (DWBA) can be applied to the theoretical calculation of the data of cross section for the electron-atom ionization collision. It is for the same energy level of incident electron with that in the material processing. In the present paper, mathematical formulations of electron-hydrogen (e, 2e) process including the exact exchange term and the novel method for numerically solving the basic equation are presented based on quantum mechanics.

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