Application of Micro-Displacement Characteristics to Nanoscale positioning

NDL Digital Collections

Bibliographic Information

Other Title
  • 122 微小変位特性のナノ位置決めへの応用

Search this article

Description

Recently, the nanoscale positioning of table is frequently required for industrial applications. There have been developed many methods of positioning together with that utilizing the friction property. In this study, using the friction property and the micro-displacement which arises when two surfaces pressed together are subjected to a tangential force, a basic idea is proposed for developing the positioning system.

Journal

Keywords

Details 詳細情報について

Report a problem

Back to top