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Deposition Profile Simulation using the Direct Simulation Monte Carlo Method
Journal
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- Proc. 7th Symp. Plasma Process.
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Proc. 7th Symp. Plasma Process. 378-389, 1988
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Details 詳細情報について
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- CRID
- 1570291226424666368
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- NII Article ID
- 20000220618
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- Data Source
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- CiNii Articles