Room temperature replication in spin on glass by nanoimprint technology
Journal
-
- J. Vac. Sci. Technol. B
-
J. Vac. Sci. Technol. B 19 (6), 2801-2805, 2001
- Tweet
Details 詳細情報について
-
- CRID
- 1570572700086237568
-
- NII Article ID
- 80012891208
-
- Data Source
-
- CiNii Articles