(Invited) Mo-gate MOS Metallization System : A-4: DEVICE TECHNOLOGY (1)
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- YANAGAWA Fumihiko
- Musashino Electrical Communication Laboratory Nippon Telegraph and Telephone Public Corporation
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- AMAZAWA Takao
- Musashino Electrical Communication Laboratory Nippon Telegraph and Telephone Public Corporation
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- OIKAWA Hideo
- Musashino Electrical Communication Laboratory Nippon Telegr
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収録刊行物
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- Japanese journal of applied physics. Supplement
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Japanese journal of applied physics. Supplement 18 (1), 237-245, 1979-03-01
社団法人応用物理学会
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詳細情報 詳細情報について
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- CRID
- 1570572702488516224
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- NII論文ID
- 110003957146
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- NII書誌ID
- AA10457686
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- ISSN
- 00214922
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- 本文言語コード
- en
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- データソース種別
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- CiNii Articles
