Torque sensor application of strain sensitive Cr-N thin films

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Bibliographic Information

Other Title
  • Cr-N ひずみゲージ薄膜のトルクセンサ応用

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Details 詳細情報について

  • CRID
    1570854176170665216
  • NII Article ID
    10031193604
  • NII Book ID
    AA11486078
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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