High performance 5 nm radius twin silicon nanowire MOSFET (TSNWFET) : Fabrication on bulk Si wafer, characteristics, and reliability
書誌事項
- 公開日
- 2005
収録刊行物
-
- IEDM Tech. Dig., Dec. 2005
-
IEDM Tech. Dig., Dec. 2005 717-720, 2005