Detection and Imaging of Subsurface Microcracks in Silicon Wafers Using Photoacoustic Microscope : Photoacoustic Spectroscopy and Ultrasonic Imaging

NAKATA Toshihiko

Production Engineering Research Laboratory, Hitachi, Ltd.
KEMBO Yukio

Production Engineering Research Laboratory, Hitachi ,Ltd.
KITAMORI Takehiko

Department of Industrial Chemistry, Faculty of Engineering the University of Tokyo
SAWADA Tsuguo

Department of Industrial Chemistry, Faculty of Engineering the University of Tokyo

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Japanese journal of applied physics. Supplement

Japanese journal of applied physics. Supplement 31 (1), 146-148, 1992-05-31

社団法人応用物理学会