Infrared Radiation Detection with YBa<SUB>2</SUB>Cu<SUB>3</SUB>O<SUB>7−<I>d</I></SUB> Microbridge

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The photoresponse of YBa2Cu3O7−d thin film with double bridges (DC-SQUID type) has been investigated under irradiation of weak laser light. The YBCO thin film of 200 nm thickness was prepared on a MgO(100) single-crystal substrate by an rf-magnetron sputtering method. It was processed to perform as a double microbridge (DC-SQUID type) patterned by ECR ion etching and then assembled as an YBCO thin-film sensor. The microbridge used here was 5 μm in width and 7.5 μm in length. The sensitivity of the sensor was determined by irradiating a modulated laser light (modulating frequency of 17 to 400 Hz, wavelength of 827 nm). The device showed both bolometric and nonbolometric behavior in the superconducting transition region. The maximum noise equivalent power (NEP) and responsivity was obtained at 76 K, and was 5×10−9 W/Hz1⁄2 and 19 V/W, respectively. The nonbolometric response was caused by vortex motion.

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