Monte Carlo simulation of topographic contrast in scanning ion microscope
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- OHYA Kaoru
- Department of Electrical and Electronic Engineering, Faculty of Engineering, University of Tokushima
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- ISHITANI Tohru
- Naka Division, Hitachi High-Technologies Corporation
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Journal
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- Journal of electron microscopy
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Journal of electron microscopy 53 (3), 229-235, 2004-06-01
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Keywords
Details 詳細情報について
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- CRID
- 1571135650064199936
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- NII Article ID
- 10013316145
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- NII Book ID
- AA00697060
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- ISSN
- 00220744
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- Text Lang
- en
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- Data Source
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- CiNii Articles