Low-Temperature Formation of Poly-Si_<1-x>Ge_x (x:0-1) on SiO_2 by Au-Mediated Lateral Crystallization
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- KANNO Hiroshi
- Kyushu University, Department of Electronics
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- AOKI Tomohisa
- Kyushu University, Department of Electronics
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- KENJO Atsushi
- Kyushu University, Department of Electronics
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- SADOH Taizoh
- Kyushu University, Department of Electronics
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- MIYAO Masanobu
- Kyushu University, Department of Electronics
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収録刊行物
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- Extended abstracts of the ... Conference on Solid State Devices and Materials
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Extended abstracts of the ... Conference on Solid State Devices and Materials 2004 516-517, 2004-09-15
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詳細情報 詳細情報について
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- CRID
- 1571135650611721600
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- NII論文ID
- 10022539215
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- NII書誌ID
- AA10777858
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- 本文言語コード
- en
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- データソース種別
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- CiNii Articles
