A Novel Shallow Trench Isolation Technique
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- CHENG Juing-Yi
- Department of Electronics Engineering and Institute of Electronics National Chiao Tung University
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- LEI Tan Fu
- Department of Electronics Engineering and Institute of Electronics National Chiao Tung University
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- CHAO Tien Sheng
- National Nano Device Laboratory
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収録刊行物
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- Extended abstracts of the ... Conference on Solid State Devices and Materials
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Extended abstracts of the ... Conference on Solid State Devices and Materials 1996 422-424, 1996-08-26
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詳細情報 詳細情報について
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- CRID
- 1571417125189814400
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- NII論文ID
- 10017199919
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- NII書誌ID
- AA10777858
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- 本文言語コード
- en
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- データソース種別
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- CiNii Articles