Low Dielectric Constant Non-Porous Fluorocarbon Films for Inter-Layer Dielectric
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- ITOH Azumi
- New Industry Creation Hatchery Center, Tohoku University
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- INOKUCHI Atsutoshi
- New Industry Creation Hatchery Center, Tohoku University
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- YASUDA Seiji
- New Industry Creation Hatchery Center, Tohoku University
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- TERAMOTO Akinobu
- New Industry Creation Hatchery Center, Tohoku University
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- GOTO Tetsuya
- New Industry Creation Hatchery Center, Tohoku University
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- HIRAYAMA Masaki
- New Industry Creation Hatchery Center, Tohoku University
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- OHMI Tadahiro
- New Industry Creation Hatchery Center, Tohoku University
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- Extended abstracts of the ... Conference on Solid State Devices and Materials
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Extended abstracts of the ... Conference on Solid State Devices and Materials 2007 378-379, 2007-09-19
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詳細情報 詳細情報について
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- CRID
- 1571417125602414336
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- NII論文ID
- 10022549202
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- NII書誌ID
- AA10777858
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- 本文言語コード
- en
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- データソース種別
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