Numerical Evaluation of Diffraction Characteristics of Binary Gratings by the RCWA Method

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Bibliographic Information

Other Title
  • RCWA(Rigorous Coupled-Wave Analysis) 法によるバイナリｰ格子の回折特性算出

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Details 詳細情報について

  • CRID
    1571698599851485312
  • NII Article ID
    10014142014
  • NII Book ID
    AN00346578
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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