Comparative study of depth and lateral distributions of electron excitation between scanning ion and scanning electron microscopes
-
- OHYA Kaoru
- Department of Electrical and Electronic Engineering, Faculty of Engineering, University of Tokushima
-
- ISHITANI Tohru
- Naka Division. Hitachi High-Technologies Corporation
この論文をさがす
収録刊行物
-
- Journal of electron microscopy
-
Journal of electron microscopy 52 (3), 291-298, 2003-06-01
- Tweet
キーワード
詳細情報 詳細情報について
-
- CRID
- 1571698599921379072
-
- NII論文ID
- 10011254991
-
- NII書誌ID
- AA00697060
-
- ISSN
- 00220744
-
- 本文言語コード
- en
-
- データソース種別
-
- CiNii Articles