Comparative study of depth and lateral distributions of electron excitation between scanning ion and scanning electron microscopes

3 Citations 31 References
  • OHYA Kaoru
    Department of Electrical and Electronic Engineering, Faculty of Engineering, University of Tokushima
  • ISHITANI Tohru
    Naka Division. Hitachi High-Technologies Corporation

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Details 詳細情報について

  • CRID
    1571698599921379072
  • NII Article ID
    10011254991
  • NII Book ID
    AA00697060
  • ISSN
    00220744
  • Text Lang
    en
  • Data Source
    • CiNii Articles

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