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Locally selective bonding of silicon and glass with laser
Bibliographic Information
- Published
- 2001
Journal
-
- Sensors and Actuators A
-
Sensors and Actuators A 93 63-, 2001
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Details 詳細情報について
-
- CRID
- 1571698599994231168
-
- NII Article ID
- 80012709075
-
- Data Source
-
- CiNii Articles