Impact of Co-salicide capping layer on GIDL in High Voltage devices for Embedded Flash memory

  • KIM Nam Sung
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • ZHAO Jing
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • MUKHO Madhusudan
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • HUANG Qiang
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • NG Yeow Keong
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • YEW Wong Wing
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • JAUW How Koon
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • YOU Young Seon
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • YOON Hyun Gu
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • SHUKLA Dhruva
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • HAN Sang Hyun
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • GOH Inn Swee
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.

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Details 詳細情報について

  • CRID
    1571698600565519744
  • NII Article ID
    10022538402
  • NII Book ID
    AA10777858
  • Text Lang
    en
  • Data Source
    • CiNii Articles

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