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Impact of Co-salicide capping layer on GIDL in High Voltage devices for Embedded Flash memory
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- KIM Nam Sung
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- ZHAO Jing
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- MUKHO Madhusudan
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- HUANG Qiang
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- NG Yeow Keong
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- YEW Wong Wing
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- JAUW How Koon
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- YOU Young Seon
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- YOON Hyun Gu
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- SHUKLA Dhruva
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- HAN Sang Hyun
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- GOH Inn Swee
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
Search this article
Journal
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- Extended abstracts of the ... Conference on Solid State Devices and Materials
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Extended abstracts of the ... Conference on Solid State Devices and Materials 2004 256-257, 2004-09-15
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Details 詳細情報について
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- CRID
- 1571698600565519744
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- NII Article ID
- 10022538402
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- NII Book ID
- AA10777858
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- Text Lang
- en
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- Data Source
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- CiNii Articles
