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Work Function Adjustment by Nitrogen Incorporation in HfN Gate Electrode
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- LAI Chao-Sung
- Department of Electronic Engineering, Chang Gung University
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- PENG Shing-Kan
- Department of Electronic Engineering, Chang Gung University
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- WANG Jer-Chyi
- Nanya Technology Corporation
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- PAN Tung-Ming
- Department of Electronic Engineering, Chang Gung University
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- FAN Kung-Ming
- Department of Electronic Engineering, Chang Gung University
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- WONG Jian-Yi
- Department of Electronic Engineering, Chang Gung University
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Journal
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- Extended abstracts of the ... Conference on Solid State Devices and Materials
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Extended abstracts of the ... Conference on Solid State Devices and Materials 2005 510-511, 2005-09-13
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Details 詳細情報について
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- CRID
- 1571980075555480960
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- NII Article ID
- 10022542404
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- NII Book ID
- AA10777858
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- Text Lang
- en
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- Data Source
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- CiNii Articles