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SAW gas sensor using sensing film with porous structure
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- KOH K.
- Faculty of Engineering, Kanagawa Institute of Technology
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- SATO Y.
- Faculty of Engineering, Kanagawa Institute of Technology
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- SATO A.
- Faculty of Engineering, Kanagawa Institute of Technology
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- EGUCHI T.
- Faculty of Engineering, Kanagawa Institute of Technology
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- HOMMA T.
- Faculty of Engineering, Kanagawa Institute of Technology
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- HOHKAWA K.
- Faculty of Engineering, Kanagawa Institute of Technology
Bibliographic Information
- Other Title
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- ポーラスな感応膜を用いた弾性波センサー
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Description
Suface acoustic wave(SAW)devices, are effectively used as highly functional and highly sensitive chemical sensors which identify unknown or target materials in gasses and liquids.We present the results of a basic study on applying porous film of rubber materials and alumina as the sensing films of the SAW sensors.We made several films with several films with different adhesive natures natures by bonding reactive materials on the rubber films and alumina film.The results verified the feasibility of these materials used as sensing films of the SAW sensors.
Journal
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- IEICE technical report. Ultrasonics
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IEICE technical report. Ultrasonics 98 (161), 49-54, 1998-07-03
The Institute of Electronics, Information and Communication Engineers
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Details 詳細情報について
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- CRID
- 1571980077313791232
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- NII Article ID
- 110003188118
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- NII Book ID
- AN1001290X
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- Text Lang
- ja
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- Data Source
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- CiNii Articles