Local oxidation of silicon and its application in semiconductor device technology
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Journal
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- Philips Research Reports
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Philips Research Reports 25 (2), 118-132, 1970
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Details 詳細情報について
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- CRID
- 1572261549368729472
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- NII Article ID
- 10006491874
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- NII Book ID
- AA00772698
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- Data Source
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- CiNii Articles