A Minimization Scheme for a period of Process Simulator Development in TCAD : Development of Simulation Standard Libraries and an Application

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Bibliographic Information

Other Title
  • TCADを構成するプロセスシミュレータの開発期間短縮手法の提案 : 標準ライブラリの開発とそれを用いた汎用プロセスシミュレータ

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Description

TCAD has been expected to become a useful tool for minimizing a period of device development, and faster development of simulator is strongly demanded to fulfill the expectation. We have developed standard software libraries first, and then constructed a process simulator using these libraries as its parts. These libraries make it possible to shorten the development period. In this paper, We mainly describe about a geometry library which is one of the most important in process simulator.

Journal

  • Technical report of IEICE. VLD

    Technical report of IEICE. VLD 97 (268), 79-86, 1997-09-25

    The Institute of Electronics, Information and Communication Engineers

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Keywords

Details 詳細情報について

  • CRID
    1572261552245876864
  • NII Article ID
    110003294487
  • NII Book ID
    AN10013323
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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