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Electrical characterisitics of Al^+ ion-implanted 4H-SiC
Journal
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- Mater. Sci. Forum
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Mater. Sci. Forum 389 803-806, 2002
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Details 詳細情報について
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- CRID
- 1572824499693447296
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- NII Article ID
- 10010750391
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- Data Source
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- CiNii Articles
