High-Rate Deposition of Intrinsic Amorphous Silicon Layers for Solar Cells using Very High Frequency Plasma at Atmospheric Pressure

  • KAKIUCHI Hiroaki
    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
  • OHMI Hiromasa
    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
  • KUWAHARA Yasuhito
    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
  • MATSUMOTO Mitsuhiro
    SANYO Electric Co., Ltd.
  • EBATA Yusuke
    SHARP Co., Ltd.
  • YASUTAKE Kiyoshi
    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
  • YOSHII Kumayasu
    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
  • MORI Yuzo
    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University

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詳細情報 詳細情報について

  • CRID
    1572824500485245568
  • NII論文ID
    10022543153
  • NII書誌ID
    AA10777858
  • 本文言語コード
    en
  • データソース種別
    • CiNii Articles

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