A Silicon Electrothermal Rotational Micro Motor Measuring one cubic millimeter
書誌事項
- 公開日
- 2006
収録刊行物
-
- J. Micromech. Microeng.
-
J. Micromech. Microeng. 16 1943-1950, 2006
J. Micromech. Microeng. 16 1943-1950, 2006