Chemical Machining by Ferric Chloride Etchant

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Bibliographic Information

Other Title
  • 塩化第二鉄液によるエッチング加工

Abstract

The photochemical machining of metals using a ferric chloride etchant is useful for producing micro machining parts and electronic parts such as printed circuit boards, shadow masks for CRT devices, IC lead frames etc. This paper presents the outlines of their examples of products, photo etching processes, photoresist materials for etch mask, machining accuracy, etchant composition, etching mechanism and characteristic phenomena.

Journal

  • CORROSION ENGINEERING

    CORROSION ENGINEERING 38 (4), 231-237, 1989

    Japan Society of Corrosion Engineering

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