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Deep Reactive Ion Etching of Pyrex Glass Using SF6 Plama
Journal
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- Sensors and Actuators A
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Sensors and Actuators A 87 139-145, 2001
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Details 詳細情報について
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- CRID
- 1573105974880198784
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- NII Article ID
- 80012232994
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- Data Source
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- CiNii Articles
