Cleaning Effect of Nano-Bubbles : 1^<st> Report : Minute Particle Contamination

2 References
  • MORIMATSU Tatsumasa
    University of Tsukuba, Graduate School of Systems and Information Engineering
  • GOTO Mizuki
    University of Tsukuba, Graduate School of Systems and Information Engineering
  • KOHNO Masamichi
    National Institute of Advanced Industrial Science and Technology (AIST)
  • YABE Akira
    National Institute of Advanced Industrial Science and Technology (AIST)

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Details 詳細情報について

  • CRID
    1573105974916325888
  • NII Article ID
    10013430266
  • NII Book ID
    AA11358679
  • ISSN
    09189963
  • Text Lang
    en
  • Data Source
    • CiNii Articles

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