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Fringe analysis for wavelength-scanning interferometers using phase-shifting method and its application to profilometry
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- KATO Jun-ichi
- Opt. Eng. Lab., Inst. Phys. & Chem. Res. (RIKEN)
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- YAMAGUCHI Ichirou
- Opt. Eng. Lab., Inst. Phys. & Chem. Res. (RIKEN)
Bibliographic Information
- Other Title
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- 位相シフト法による波長走査干渉縞の処理とその形状測定への応用
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Journal
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- 光波センシング技術研究会講演論文集 = Proceedings of ... Meeting on Lightwave Sensing Technology
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光波センシング技術研究会講演論文集 = Proceedings of ... Meeting on Lightwave Sensing Technology 20 37-43, 1997-12-10
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Details 詳細情報について
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- CRID
- 1573105975008451072
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- NII Article ID
- 10015810201
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- NII Book ID
- AN10547747
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- Text Lang
- ja
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- Data Source
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- CiNii Articles