Improvement of Bit-Line Contact Resistance for Memory Devices with Silicide Gate

  • KIM T. H.
    DRAM Product Engineering, Memory Business, Samsung Electronics
  • CHOI Y. J.
    DRAM Product Engineering, Memory Business, Samsung Electronics
  • MOON C. Y.
    DRAM Product Engineering, Memory Business, Samsung Electronics
  • KOH H. C.
    DRAM Product Engineering, Memory Business, Samsung Electronics
  • JIN J. H.
    DRAM Product Engineering, Memory Business, Samsung Electronics
  • RYU B. I.
    DRAM Product Engineering, Memory Business, Samsung Electronics

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  • CRID
    1573105975049996800
  • NII論文ID
    10017194288
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    AA10777858
  • 本文言語コード
    en
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