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A new low temperature APM cleaning process to improve ONO integrity in 0.18μm stacked-gate EEPROM memory
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- ZHAO Jing
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- KIM Nam Sung
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- NG Junsyong
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- WONG Kumfai
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- ZHANG Wenyi
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- MUKHOPADHYAY M.
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
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- SHUKLA Dhruva
- Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
Search this article
Journal
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- Extended abstracts of the ... Conference on Solid State Devices and Materials
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Extended abstracts of the ... Conference on Solid State Devices and Materials 2005 638-639, 2005-09-13
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Details 詳細情報について
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- CRID
- 1573105975462748800
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- NII Article ID
- 10022542787
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- NII Book ID
- AA10777858
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- Text Lang
- en
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- Data Source
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- CiNii Articles