A new low temperature APM cleaning process to improve ONO integrity in 0.18μm stacked-gate EEPROM memory

  • ZHAO Jing
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • KIM Nam Sung
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • NG Junsyong
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • WONG Kumfai
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • ZHANG Wenyi
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • MUKHOPADHYAY M.
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.
  • SHUKLA Dhruva
    Process Integration Department, Systems on Silicon Manufacturing Co. Pte. Ltd.

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Details 詳細情報について

  • CRID
    1573105975462748800
  • NII Article ID
    10022542787
  • NII Book ID
    AA10777858
  • Text Lang
    en
  • Data Source
    • CiNii Articles

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